Effect of annealing conditions on the perpendicular magnetic anisotropy of Ta/CoFeB/MgO multilayers
Liu, Yan; Hao, Liang; Cao, Jiangwei
2016-04
发表期刊AIP ADVANCES
卷号6期号:4
摘要

Films with a structure of Ta (5 nm)/Co20Fe60B20 (0.8-1.5 nm)/MgO (1 nm)/Ta (1 nm) were deposited on Corning glass substrates by magnetron sputtering. The as-deposited films with CoFeB layer thickness from 0.8 to 1.3 nm show perpendicular magnetic anisotropy (PMA). After annealing at a proper temperature, the PMA of the films can be enhanced remarkably. A maximum effective anisotropy field of up to 9 kOe was obtained for 1.0- and 1.1-nm-thick CoFeB layers annealed at an optimum temperature of 300 degrees C. A 4-kOe magnetic field was applied during annealing to study its effect on the PMA of the CoFeB layers. The results confirmed that applying a perpendicular magnetic field during annealing did not improve the maximum PMA of the films, but it did enhance the PMA of the thinner films at a lower annealing temperature. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).;Films with a structure of Ta (5 nm)/Co20Fe60B20 (0.8-1.5 nm)/MgO (1 nm)/Ta (1 nm) were deposited on Corning glass substrates by magnetron sputtering. The as-deposited films with CoFeB layer thickness from 0.8 to 1.3 nm show perpendicular magnetic anisotropy (PMA). After annealing at a proper temperature, the PMA of the films can be enhanced remarkably. A maximum effective anisotropy field of up to 9 kOe was obtained for 1.0- and 1.1-nm-thick CoFeB layers annealed at an optimum temperature of 300 degrees C. A 4-kOe magnetic field was applied during annealing to study its effect on the PMA of the CoFeB layers. The results confirmed that applying a perpendicular magnetic field during annealing did not improve the maximum PMA of the films, but it did enhance the PMA of the thinner films at a lower annealing temperature. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

关键词Annealing Annealing Cobalt compounds Cobalt compounds Iron compounds Iron compounds Magnetic fields Magnetic fields Magnetic multilayers Magnetic multilayers Substrates Substrates Annealing temperatures Annealing temperatures As As deposited films deposited films Effect of annealing Effect of annealing Effective anisotropy Effective anisotropy Layer thickness Layer thickness Optimum temperature Optimum temperature Perpendicular magnetic anisotropy Perpendicular magnetic anisotropy Perpendicular magnetic fields Perpendicular magnetic fields
DOI10.1063/1.4947132
收录类别SCI ; SCOPUS ; SCIE ; EI
ISSN2158-3226
语种英语
WOS研究方向Science & Technology - Other Topics ; Science & Technology - Other Topics ; Materials Science ; Materials Science ; Physics ; Physics
WOS类目Nanoscience & Nanotechnology ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Applied
WOS记录号WOS:000375845100008
出版者AMER INST PHYSICS
EI入藏号20162102404651
原始文献类型Article
引用统计
被引频次:26[WOS]   [WOS记录]     [WOS相关记录]
文献类型期刊论文
条目标识符http://ir.lzufe.edu.cn/handle/39EH0E1M/12541
专题信息工程与人工智能学院
作者单位1.Lanzhou Univ Finance & Econ, Sch Informat Engn, Lanzhou 730020, Peoples R China;
2.Lanzhou Univ, Minist Educ, Key Lab Magnetism & Magnet Mat, Lanzhou 730000, Peoples R China;
3.Lanzhou Univ, Minist Educ, Key Lab Special Funct Mat & Struct Design, Lanzhou 730000, Peoples R China
推荐引用方式
GB/T 7714
Liu, Yan,Hao, Liang,Cao, Jiangwei. Effect of annealing conditions on the perpendicular magnetic anisotropy of Ta/CoFeB/MgO multilayers[J]. AIP ADVANCES,2016,6(4).
APA Liu, Yan,Hao, Liang,&Cao, Jiangwei.(2016).Effect of annealing conditions on the perpendicular magnetic anisotropy of Ta/CoFeB/MgO multilayers.AIP ADVANCES,6(4).
MLA Liu, Yan,et al."Effect of annealing conditions on the perpendicular magnetic anisotropy of Ta/CoFeB/MgO multilayers".AIP ADVANCES 6.4(2016).
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